Invention Grant
US09344807B2 Capacitance-type transducer, acoustic sensor, and microphone 有权
电容式传感器,声学传感器和麦克风

Capacitance-type transducer, acoustic sensor, and microphone
Abstract:
A capacitance-type transducer has a substrate having a cavity, a vibrating electrode plate disposed above the substrate, a back plate disposed on the substrate, a fixed electrode plate disposed on the back plate opposite the vibrating electrode plate, a plurality of holes formed in the back plate and the fixed electrode plate, and a protrusion disposed on the back plate at a location opposing the vibrating electrode plate. In a view from a direction perpendicular to an upper surface of the substrate, a shortest distance from a cross-sectional center of the protrusion to an edge of a hole adjacent to the protrusion is larger than a shortest distance from a center of a region that is surrounded by the holes but not provided with the protrusion to an edge of a hole in the periphery.
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