Invention Grant
- Patent Title: Capacitance-type transducer, acoustic sensor, and microphone
- Patent Title (中): 电容式传感器,声学传感器和麦克风
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Application No.: US14482302Application Date: 2014-09-10
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Publication No.: US09344807B2Publication Date: 2016-05-17
- Inventor: Yuki Uchida
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2013-190630 20130913
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/00 ; H04R19/04 ; H04R31/00 ; H04R1/08

Abstract:
A capacitance-type transducer has a substrate having a cavity, a vibrating electrode plate disposed above the substrate, a back plate disposed on the substrate, a fixed electrode plate disposed on the back plate opposite the vibrating electrode plate, a plurality of holes formed in the back plate and the fixed electrode plate, and a protrusion disposed on the back plate at a location opposing the vibrating electrode plate. In a view from a direction perpendicular to an upper surface of the substrate, a shortest distance from a cross-sectional center of the protrusion to an edge of a hole adjacent to the protrusion is larger than a shortest distance from a center of a region that is surrounded by the holes but not provided with the protrusion to an edge of a hole in the periphery.
Public/Granted literature
- US20150078589A1 CAPACITANCE-TYPE TRANSDUCER, ACOUSTIC SENSOR, AND MICROPHONE Public/Granted day:2015-03-19
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