Invention Grant
US09347890B2 Low-noise sensor and an inspection system using a low-noise sensor
有权
低噪声传感器和使用低噪声传感器的检测系统
- Patent Title: Low-noise sensor and an inspection system using a low-noise sensor
- Patent Title (中): 低噪声传感器和使用低噪声传感器的检测系统
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Application No.: US14273424Application Date: 2014-05-08
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Publication No.: US09347890B2Publication Date: 2016-05-24
- Inventor: David L. Brown , Yung-Ho Chuang , John Fielden
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; G01N21/956 ; H01L31/02

Abstract:
A method of inspecting a sample at high speed includes directing and focusing radiation onto a sample, and receiving radiation from the sample and directing received radiation to an image sensor. Notably, the method includes driving the image sensor with predetermined signals. The predetermined signals minimize a settling time of an output signal of the image sensor. The predetermined signals are controlled by a phase accumulator, which is used to select look-up values. The driving can further include loading an initial phase value, selecting most significant bits of the phase accumulator, and converting the look-up values to an analog signal. In one embodiment, for each cycle of a phase clock, a phase increment can be added to the phase accumulator. The driving can be performed by a custom waveform generator.
Public/Granted literature
- US20150177159A1 Low-Noise Sensor And An Inspection System Using A Low-Noise Sensor Public/Granted day:2015-06-25
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