Invention Grant
- Patent Title: Reduced height M1 metal lines for local on-chip routing
- Patent Title (中): 降低M1金属线路用于本地片上路由
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Application No.: US14206360Application Date: 2014-03-12
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Publication No.: US09349686B2Publication Date: 2016-05-24
- Inventor: Stanley Seungchul Song , Choh Fei Yeap , Zhongze Wang , Niladri Mojumder , Mustafa Badaroglu
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM INCORPORATED
- Current Assignee: QUALCOMM INCORPORATED
- Current Assignee Address: US CA San Diego
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L23/532 ; H01L21/768

Abstract:
Systems and methods are directed to an integrated circuit comprising a reduced height M1 metal line formed of an exemplary material with lower mean free path than Copper, for local routing of on-chip circuit elements of the integrated circuit, wherein the height of the reduced height M1 metal line is lower than a minimum allowed or allowable height of a conventional M1 metal line formed of Copper. The exemplary materials for forming the reduced height M1 metal line include Tungsten (W), Molybdenum (Mo), and Ruthenium (Ru), wherein these exemplary materials also exhibit lower capacitance and lower RC delays than Copper, while providing high electromigration reliability.
Public/Granted literature
- US20150262930A1 REDUCED HEIGHT M1 METAL LINES FOR LOCAL ON-CHIP ROUTING Public/Granted day:2015-09-17
Information query
IPC分类: