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US09349771B2 Microlens forming method and solid-state image sensor manufacturing method 有权
微透镜成型方法和固态图像传感器的制造方法

Microlens forming method and solid-state image sensor manufacturing method
摘要：
A microlens forming method, comprising etching a first member and a second member arranged on the first member, the second member including a concavo-convex shape, and forming a microlens from the first member, wherein, the etching of the first and the second members is performed under a condition that an etching rate of the first member is higher than that of the second member, a portion of the first member under the concave portion is exposed during the etching of the second member, and the exposed portion of the first member is removed in the etching of the first member.
摘要（中）：

一种微透镜形成方法，包括蚀刻布置在第一构件上的第一构件和第二构件，第二构件包括凹凸形状，以及从第一构件形成微透镜，其中，蚀刻第一和第二构件 在所述第一部件的蚀刻速度高于所述第二部件的蚀刻速度的条件下进行，所述第一部件在所述凹部下方的部分在所述第二部件的蚀刻期间露出，所述第一部件的露出部 在第一构件的蚀刻中被去除。

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