发明授权
US09349795B2 Semiconductor switching device with different local threshold voltage
有权
具有不同局部阈值电压的半导体开关器件
- 专利标题: Semiconductor switching device with different local threshold voltage
- 专利标题(中): 具有不同局部阈值电压的半导体开关器件
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申请号: US14310011申请日: 2014-06-20
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公开(公告)号: US09349795B2公开(公告)日: 2016-05-24
- 发明人: Christian Fachmann , Enrique Vecino Vazquez
- 申请人: Infineon Technologies Austria AG
- 申请人地址: AT Villach
- 专利权人: Infineon Technologies Austria AG
- 当前专利权人: Infineon Technologies Austria AG
- 当前专利权人地址: AT Villach
- 代理机构: Murphy, Bilak & Homiller, PLLC
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/06 ; H01L29/739 ; H01L29/417 ; H01L29/423 ; H01L29/10 ; H01L21/283 ; H01L21/22 ; H01L27/06 ; H01L21/8249 ; H01L29/78
摘要:
A semiconductor device includes a semiconductor substrate having a plurality of switchable cells defining an active area of the semiconductor device, an outer rim, and an edge termination region arranged between the switchable cells and the outer rim. Each of the switchable cells includes a body region, a gate electrode structure and a source region. A source metallization is in ohmic contact with the source regions of the switchable cells. A a gate metallization is in ohmic contact with the gate electrode structures of the switchable cells. The active area defined by the switchable cells includes at least a first switchable region having a first threshold and at least a second switchable region having a second threshold which is higher than the first threshold. An area assumed by the first switchable region is larger than an area assumed by the second switchable region.
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