Invention Grant
US09349870B2 Method for forming low-temperature polysilicon thin film, thin film transistor and display device
有权
用于形成低温多晶硅薄膜,薄膜晶体管和显示装置的方法
- Patent Title: Method for forming low-temperature polysilicon thin film, thin film transistor and display device
- Patent Title (中): 用于形成低温多晶硅薄膜,薄膜晶体管和显示装置的方法
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Application No.: US14365227Application Date: 2013-12-10
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Publication No.: US09349870B2Publication Date: 2016-05-24
- Inventor: Lei Wang , Xueyan Tian , Jang Soon Im
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD
- Current Assignee Address: CN Beijing
- Agency: Collard & Roe, P.C.
- Priority: CN201310455936 20130929
- International Application: PCT/CN2013/088910 WO 20131210
- International Announcement: WO2015/043081 WO 20150402
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L29/786 ; H01L21/02 ; H01L29/49 ; H01L29/66 ; H01L27/12

Abstract:
A method for forming low-temperature polysilicon thin film, a thin film transistor and a display device are provided. The method for forming low-temperature polysilicon thin film comprises: depositing an amorphous silicon thin film on a base substrate; covering the amorphous silicon thin film with an anti-reflective optical film; performing photolithography and etching on the anti-reflective optical film such that light condensing structures are provided in an array on the anti-reflective optical film; and irradiating the amorphous silicon thin film with the anti-reflective optical film covered by laser light such that the amorphous silicon film is converted into the low-temperature polysilicon thin film. The method may improve the grain size and uniformity of the low-temperature polysilicon thin film, make full use of the energy of the incident laser light, facilitate the reduction of the production cost of the low-temperature polysilicon thin film, and improve the performance of the low-temperature polysilicon thin film transistor.
Public/Granted literature
- US20150091010A1 METHOD FOR FORMING LOW-TEMPERATURE POLYSILICON THIN FILM, THIN FILM TRANSISTOR AND DISPLAY DEVICE Public/Granted day:2015-04-02
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