Invention Grant
US09349904B2 Photodetector with integrated microfluidic channel and manufacturing process thereof
有权
具有集成微流体通道的光电检测器及其制造方法
- Patent Title: Photodetector with integrated microfluidic channel and manufacturing process thereof
- Patent Title (中): 具有集成微流体通道的光电检测器及其制造方法
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Application No.: US13925577Application Date: 2013-06-24
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Publication No.: US09349904B2Publication Date: 2016-05-24
- Inventor: Alfio Russo , Giuseppina Valvo
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IL Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IL Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2012A0634 20120718
- Main IPC: G01N21/05
- IPC: G01N21/05 ; H01L31/18 ; G01N21/64 ; H01L31/107 ; B01L3/00
Abstract:
A photodetector including: a photodiode having a body made of semiconductor material delimited by a first surface, the body forming a first electrode region; a dielectric region, set on top of the first surface and delimited by a second surface; at least one channel extending within the dielectric region, starting from the second surface; and a first metallization, which is set on top of the second surface and is in electrical contact with the first electrode region.
Public/Granted literature
- US20140021330A1 PHOTODETECTOR WITH INTEGRATED MICROFLUIDIC CHANNEL AND MANUFACTURING PROCESS THEREOF Public/Granted day:2014-01-23
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