发明授权
- 专利标题： Substrate gripper apparatus and methods
- 专利标题（中）： 基板夹具装置及方法
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申请号： US14602094申请日： 2015-01-21
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公开(公告)号： US09352471B1公开(公告)日： 2016-05-31
- 发明人: Edwin Velazquez , Gee Hoey , Jim K. Atkinson
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Dugan & Dugan, PC
- 主分类号： B66C1/42
- IPC分类号： B66C1/42 ; B25J15/00
摘要：
A substrate gripper apparatus is provided. Substrate gripper apparatus includes a body, a first slide member moveable relative to the body, a first finger mounting member coupled to the first slide member, a first lower finger coupled to the first finger mounting member, and a first pivoting finger coupled to the first finger mounting member. First pivoting member may impose a force on a substrate due to gravity. Methods of operating the substrate gripper apparatus as well as other aspects are provided.
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