发明授权
- 专利标题： Apparatus and method for inspecting short circuit defects
- 专利标题（中）： 用于检查短路缺陷的装置和方法
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申请号： US13672031申请日： 2012-11-08
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公开(公告)号： US09361820B2公开(公告)日： 2016-06-07
- 发明人: June-Woo Lee , Jae-Beom Choi , Kwan-Wook Jung , Sung-Soo Choi , Seong-Jun Kim , Guang-Hai Jin , Ga-Young Kim , Jee-Hoon Kim
- 申请人： Samsung Display Co., Ltd.
- 申请人地址： KR Giheung-Gu, Yongin-si, Gyeonggi-do
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR Giheung-Gu, Yongin-si, Gyeonggi-do
- 代理商 Robert E. Bushnell, Esq.
- 优先权： KR10-2012-0053155 20120518
- 主分类号： G01R31/02
- IPC分类号： G01R31/02 ; G06F3/045 ; G09G3/00 ; G09G3/32
摘要：
A method of inspecting a short circuit defect between first wires extending in a first direction and a second direction intersecting the first direction and second wires extending in the first or second direction, the method including inspecting a short circuit defect between the first and second wires by using a potential difference monitored only in the second wires.
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