Invention Grant
- Patent Title: Method of forming a memory and method of forming a memory array
- Patent Title (中): 形成存储器的方法和形成存储器阵列的方法
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Application No.: US14837029Application Date: 2015-08-27
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Publication No.: US09362498B2Publication Date: 2016-06-07
- Inventor: Klaus Knobloch , Robert Strenz
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L45/00 ; H01L27/24

Abstract:
A method of forming a memory includes forming a first electrode and a second electrode within a first layer over a semiconductor substrate, forming a resistive-switching memory element and an antifuse element over the first layer, wherein the resistive-switching memory element includes a metal oxide layer and is electrically contacting the first electrode, wherein the metal oxide layer has a first thickness and a forming voltage that corresponds to the first thickness, wherein the antifuse element includes a dielectric layer and is electrically contacting the second electrode, and wherein the dielectric layer has a second thickness that is less than the first thickness and a dielectric breakdown voltage that is less than the forming voltage, and forming a third electrode and a fourth electrode within a second layer over the resistive-switching memory element and the antifuse element, wherein the third electrode is electrically contacting the resistive-switching memory element and the fourth electrode is electrically contacting the antifuse element.
Public/Granted literature
- US20150372230A1 METHOD OF FORMING A MEMORY AND METHOD OF FORMING A MEMORY ARRAY Public/Granted day:2015-12-24
Information query
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