Invention Grant
- Patent Title: System and method to reduce oscillations in extreme ultraviolet light generation
- Patent Title (中): 减少极紫外光发生振荡的系统和方法
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Application No.: US14454565Application Date: 2014-08-07
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Publication No.: US09363877B2Publication Date: 2016-06-07
- Inventor: Matthew Graham
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Gard & Kaslow LLP
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
A droplet generation system for use with a laser produced plasma (LPP) extreme ultraviolet (EUV) source plasma chamber is described. During EUV generation, oscillations can occur as a function of droplet time-of-flight within the plasma chamber. To reduce these oscillations, a droplet controller adjusts the rate at which droplets are generated which, in turn, dictates the droplet time-of-flight. The droplets are a result of coalescence of generated microdroplets such that the rate at which the droplets are generated is dictated by a frequency of a signal used to generate the microdroplets. This adjustment can be a modulation of a baseline droplet frequency. In some instances, the modulation function may be a sinusoid or implemented as a pseudo-random switch.
Public/Granted literature
- US20160044772A1 SYSTEM AND METHOD TO REDUCE OSCILLATIONS IN EXTREME ULTRAVIOLET LIGHT GENERATION Public/Granted day:2016-02-11
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