Invention Grant
- Patent Title: Method of forming a fine pattern
- Patent Title (中): 形成精细图案的方法
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Application No.: US14718127Application Date: 2015-05-21
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Publication No.: US09365933B2Publication Date: 2016-06-14
- Inventor: Jung-Ha Son , Su-Bin Bae , Yu-Gwang Jeong , Lei Xie , Yun-Jong Yeo , Joo-Hyung Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0161671 20141119
- Main IPC: C23F1/02
- IPC: C23F1/02 ; H01L21/033 ; G03F7/00

Abstract:
A method of forming a fine pattern includes providing a first metal layer on a base substrate, providing a first passivation layer on the first metal layer, providing a mask pattern on the first passivation layer, providing a partitioning wall pattern having a reverse taper shape by etching the first passivation layer, coating a composition having a block copolymer between the partitioning wall patterns adjacent each other, providing a self-aligned pattern by heating the composition, and providing a metal pattern by etching the first metal layer using the self-aligned pattern as a mask.
Public/Granted literature
- US20160138169A1 METHOD OF FORMING A FINE PATTERN Public/Granted day:2016-05-19
Information query
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