发明授权
US09366785B2 Mold, method for manufacturing a mold, and antireflective film 有权
模具,制造模具的方法和抗反射膜

Mold, method for manufacturing a mold, and antireflective film
摘要:
A moth-eye mold fabrication method includes: (a) providing an aluminum film deposited on a base, the aluminum film having a thickness of not less than 0.5 μm and not more than 5 μm, a surface of the aluminum film having a plurality of crystal grains whose average crystal grain diameter is not less than 200 nm and not more than 5 μm; (b) after step (a), anodizing the surface of the aluminum film to form a porous alumina layer which has a plurality of minute recessed portions; and (c) after step (b), bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions of the porous alumina layer. A method of readily fabricating a mold is produced that is for manufacture of an antireflection film in which a moth-eye structure is superposed over an antiglare structure.
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