Invention Grant
- Patent Title: Flexible, stretchable electronic devices
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Application No.: US14732689Application Date: 2015-06-06
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Publication No.: US09368420B2Publication Date: 2016-06-14
- Inventor: Stephen W. Bedell , Wilfried E. Haensch , Bahman Hekmatshoartabari , Ghavam G. Shahidi , Davood Shahrjerdi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts, Mlotkowski, Safran & Cole PC
- Agent Yuanmin Cai; Andrew M. Calderon
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L23/14 ; H01L27/12 ; H01L27/092 ; H01L23/538 ; H01L21/762

Abstract:
Fabrication methods are disclosed that facilitate the production of electronic structures that are both flexible and stretchable to conform to non-planar (e.g. curved) surfaces without suffering functional damage due to excessive strain. Electronic structures including CMOS devices are provided that can be stretched or squeezed within acceptable limits without failing or breaking. The methods disclosed herein further facilitate the production of flexible, stretchable electronic structures having multiple levels of intra-chip connectors. Such connectors are formed through deposition and photolithographic patterning (back end of the line processing) and can be released following transfer of the electronic structures to flexible substrates.
Public/Granted literature
- US20150270187A1 FLEXIBLE, STRETCHABLE ELECTRONIC DEVICES Public/Granted day:2015-09-24
Information query
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