Invention Grant
- Patent Title: Method and structure to suppress FinFET heating
- Patent Title (中): 抑制FinFET加热的方法和结构
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Application No.: US14325668Application Date: 2014-07-08
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Publication No.: US09368493B2Publication Date: 2016-06-14
- Inventor: Emre Alptekin , Viraj Yashawant Sardesai , Cung Do Tran , Reinaldo Ariel Vega
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/088 ; H01L21/8234 ; H01L29/16 ; H01L29/06 ; H01L21/02 ; H01L21/762 ; H01L21/3065

Abstract:
Embodiments of the present invention provide structures and methods for heat suppression in finFET devices. Fins are formed in a semiconductor substrate. A graphene layer is formed on a lower portion of the sidewalls of the fins. A shallow trench isolation region is disposed on the structure and covers the graphene layer, while an upper portion of the fins protrudes from the shallow trench isolation region. The graphene layer may also be deposited on a top surface of the base semiconductor substrate. The graphene serves to conduct heat away from the fins more effectively than other dielectric materials.
Public/Granted literature
- US20160013184A1 METHOD AND STRUCTURE TO SUPPRESS FINFET HEATING Public/Granted day:2016-01-14
Information query
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