发明授权
- 专利标题: Semiconductor devices having bridge layer and methods of manufacturing the same
- 专利标题(中): 具有桥接层的半导体器件及其制造方法
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申请号: US14576368申请日: 2014-12-19
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公开(公告)号: US09368495B2公开(公告)日: 2016-06-14
- 发明人: Seok-Hoon Kim , Jin-Bum Kim , Kwan-Heum Lee , Byeong-Chan Lee , Cho-Eun Lee , Jin-Hee Han , Bon-Young Koo
- 申请人: Seok-Hoon Kim , Jin-Bum Kim , Kwan-Heum Lee , Byeong-Chan Lee , Cho-Eun Lee , Jin-Hee Han , Bon-Young Koo
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel & Sibley, P.A.
- 优先权: KR10-2014-0057209 20140513
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/088 ; H01L27/02 ; H01L29/78
摘要:
A semiconductor device includes a substrate, a first active fin and a second active fin on the substrate, respectively, a plurality of first epitaxial layers on the first active fin and on the second active fin, respectively, a plurality of second epitaxial layers on the plurality of first epitaxial layers, a bridge layer connecting the plurality of second epitaxial layers to each other, and a third epitaxial layer on the bridge layer.
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