Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US14541165Application Date: 2014-11-14
-
Publication No.: US09368638B2Publication Date: 2016-06-14
- Inventor: Shunpei Yamazaki , Takahiro Tsuji , Teruaki Ochiai , Koji Kusunoki , Hidekazu Miyairi
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2009-276740 20091204
- Main IPC: H01L29/04
- IPC: H01L29/04 ; H01L31/036 ; H01L31/0376 ; H01L31/20 ; H01L29/786 ; H01L29/45

Abstract:
An object is to provide a highly reliable transistor and a semiconductor device including the transistor. A semiconductor device including a gate electrode; a gate insulating film over the gate electrode; an oxide semiconductor film over the gate insulating film; and a source electrode and a drain electrode over the oxide semiconductor film, in which activation energy of the oxide semiconductor film obtained from temperature dependence of a current (on-state current) flowing between the source electrode and the drain electrode when a voltage greater than or equal to a threshold voltage is applied to the gate electrode is greater than or equal to 0 meV and less than or equal to 25 meV, is provided.
Public/Granted literature
- US20150069390A1 SEMICONDUCTOR DEVICE Public/Granted day:2015-03-12
Information query
IPC分类: