Invention Grant
- Patent Title: MEMS membrane overtravel stop
- Patent Title (中): MEMS膜超行程停止
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Application No.: US14444136Application Date: 2014-07-28
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Publication No.: US09369804B2Publication Date: 2016-06-14
- Inventor: Thomas Buck , John Zinn , Andy Doller , Brett Diamond , Bernhard Gehl
- Applicant: Akustica, Inc. , Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L23/58 ; H01L27/088 ; H01L23/48 ; H04R7/06 ; H04R19/00 ; H04R19/04 ; H04R7/20 ; H04R31/00
Abstract:
A micro electrical mechanical system (MEMS) device in one embodiment includes a substrate defining a back cavity, a membrane above the back cavity, a back plate above the membrane, and a first overtravel stop (OTS) positioned at least partially directly beneath the membrane and supported by the back plate.
Public/Granted literature
- US20160029126A1 MEMS Membrane Overtravel Stop Public/Granted day:2016-01-28
Information query
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