发明授权
- 专利标题: Microelectromechanical sensor with differentiated performances and method of controlling a microelectromechanical sensor
- 专利标题(中): 微机电传感器具有差异化的性能和控制微机电传感器的方法
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申请号: US13648218申请日: 2012-10-09
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公开(公告)号: US09372085B2公开(公告)日: 2016-06-21
- 发明人: Andrea Donadel , Tommaso Ungaretti , Andrea Visconti , Carlo Caminada
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed IP Law Group PLLC
- 优先权: ITTO2011A0687 20110728
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01C19/5712 ; G01C19/5719
摘要:
A microelectromechanical sensor includes a supporting structure and a sensing mass, which is elastically coupled to the supporting structure, is movable with respect thereto with one degree of freedom in response to movements according to an axis and is coupled to the supporting structure through a capacitive coupling. A sensing device senses, on terminals of the capacitive coupling, transduction signals indicative of displacements of the first sensing mass according to the degree of freedom. The sensing device includes at least one first reading chain, having first operative parameters, one second reading chain, having second operative parameters different from the first operative parameters, and one selective electrical connection structure that couples the first reading chain and the second reading chain to the first terminals.
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