Invention Grant
- Patent Title: Microelectromechanical sensor with differentiated performances and method of controlling a microelectromechanical sensor
- Patent Title (中): 微机电传感器具有差异化的性能和控制微机电传感器的方法
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Application No.: US13648218Application Date: 2012-10-09
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Publication No.: US09372085B2Publication Date: 2016-06-21
- Inventor: Andrea Donadel , Tommaso Ungaretti , Andrea Visconti , Carlo Caminada
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2011A0687 20110728
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5712 ; G01C19/5719

Abstract:
A microelectromechanical sensor includes a supporting structure and a sensing mass, which is elastically coupled to the supporting structure, is movable with respect thereto with one degree of freedom in response to movements according to an axis and is coupled to the supporting structure through a capacitive coupling. A sensing device senses, on terminals of the capacitive coupling, transduction signals indicative of displacements of the first sensing mass according to the degree of freedom. The sensing device includes at least one first reading chain, having first operative parameters, one second reading chain, having second operative parameters different from the first operative parameters, and one selective electrical connection structure that couples the first reading chain and the second reading chain to the first terminals.
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