Invention Grant
US09372114B2 Spectrophotometer comprising an integrated Fabry-Perot interferometer
有权
分光光度计包括一个集成的法布里 - 珀罗干涉仪
- Patent Title: Spectrophotometer comprising an integrated Fabry-Perot interferometer
- Patent Title (中): 分光光度计包括一个集成的法布里 - 珀罗干涉仪
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Application No.: US14513669Application Date: 2014-10-14
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Publication No.: US09372114B2Publication Date: 2016-06-21
- Inventor: William N. Carr
- Applicant: William N. Carr
- Agency: Kaplan Breyer Schwarz & Ottesen, LLP
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01J3/45 ; G01J3/26 ; G01J3/10 ; G01N21/31

Abstract:
An “integrated” Fabry-Perot interferometer, such as for use in a spectrophotometer, is fabricated by attaching two micro-machined semiconductor-on-insulator wafers to one another. One mirror is formed on each micro-machined wafer. One mirror is supported by a thermally insulated, suspended micro-platform. In some embodiments, interferometer cavity length is adjustable. Detectors are disposed at least partially within the micro-platform. In some embodiments, the interferometer, a light source, and other circuitry and components, such as wireless communications components, are contained in a sealed package that includes a sampling region, thereby providing an integrated spectrophotometer. The integrated spectrophotometer can be implanted, for example, in animal tissue environments, such as for analyzing various compounds in the blood.
Public/Granted literature
- US20160054179A1 Spectrophotometer Comprising an Integrated Fabry-Perot Interferometer Public/Granted day:2016-02-25
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