Invention Grant
US09372114B2 Spectrophotometer comprising an integrated Fabry-Perot interferometer 有权
分光光度计包括一个集成的法布里 - 珀罗干涉仪

Spectrophotometer comprising an integrated Fabry-Perot interferometer
Abstract:
An “integrated” Fabry-Perot interferometer, such as for use in a spectrophotometer, is fabricated by attaching two micro-machined semiconductor-on-insulator wafers to one another. One mirror is formed on each micro-machined wafer. One mirror is supported by a thermally insulated, suspended micro-platform. In some embodiments, interferometer cavity length is adjustable. Detectors are disposed at least partially within the micro-platform. In some embodiments, the interferometer, a light source, and other circuitry and components, such as wireless communications components, are contained in a sealed package that includes a sampling region, thereby providing an integrated spectrophotometer. The integrated spectrophotometer can be implanted, for example, in animal tissue environments, such as for analyzing various compounds in the blood.
Information query
Patent Agency Ranking
0/0