Invention Grant
US09372154B2 Method and apparatus for infrared scattering scanning near-field optical microscopy 有权
用于红外散射扫描近场光学显微镜的方法和装置

  • Patent Title: Method and apparatus for infrared scattering scanning near-field optical microscopy
  • Patent Title (中): 用于红外散射扫描近场光学显微镜的方法和装置
  • Application No.: US14322768
    Application Date: 2014-07-02
  • Publication No.: US09372154B2
    Publication Date: 2016-06-21
  • Inventor: Craig Prater
  • Applicant: Craig Prater
  • Applicant Address: US CA Santa Barbara
  • Assignee: Anasys Instruments
  • Current Assignee: Anasys Instruments
  • Current Assignee Address: US CA Santa Barbara
  • Agent Mark Rodgers
  • Main IPC: G01Q30/02
  • IPC: G01Q30/02 G01N21/47 G01Q60/22
Method and apparatus for infrared scattering scanning near-field optical microscopy
Abstract:
This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration.
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