发明授权
US09372154B2 Method and apparatus for infrared scattering scanning near-field optical microscopy 有权
用于红外散射扫描近场光学显微镜的方法和装置

  • 专利标题: Method and apparatus for infrared scattering scanning near-field optical microscopy
  • 专利标题(中): 用于红外散射扫描近场光学显微镜的方法和装置
  • 申请号: US14322768
    申请日: 2014-07-02
  • 公开(公告)号: US09372154B2
    公开(公告)日: 2016-06-21
  • 发明人: Craig Prater
  • 申请人: Craig Prater
  • 申请人地址: US CA Santa Barbara
  • 专利权人: Anasys Instruments
  • 当前专利权人: Anasys Instruments
  • 当前专利权人地址: US CA Santa Barbara
  • 代理商 Mark Rodgers
  • 主分类号: G01Q30/02
  • IPC分类号: G01Q30/02 G01N21/47 G01Q60/22
Method and apparatus for infrared scattering scanning near-field optical microscopy
摘要:
This invention involves measurement of optical properties of materials with sub-micron spatial resolution through infrared scattering scanning near field optical microscopy (s-SNOM). Specifically, the current invention provides substantial improvements over the prior art by achieving high signal to noise, high measurement speed and high accuracy of optical amplitude and phase. Additionally, it some embodiments, it eliminates the need for an in situ reference to calculate wavelength dependent spectra of optical phase, or absorption spectra. These goals are achieved via improved asymmetric interferometry where the near-field scattered light is interfered with a reference beam in an interferometer. The invention achieves dramatic improvements in background rejection by arranging a reference beam that is much more intense than the background scattered radiation. Combined with frequency selective demodulation techniques, the near-field scattered light can be efficiently and accurately discriminated from background scattered light. These goals are achieved via a range of improvements including a large dynamic range detector, careful control of relative beam intensities, and high bandwidth demodulation techniques. In other embodiments, phase and amplitude stability are improved with a novel s-SNOM configuration.
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