发明授权
US09372392B2 Reticles for use in forming implant masking layers and methods of forming implant masking layers
有权
用于形成植入物掩模层的网状物和形成植入物掩蔽层的方法
- 专利标题: Reticles for use in forming implant masking layers and methods of forming implant masking layers
- 专利标题(中): 用于形成植入物掩模层的网状物和形成植入物掩蔽层的方法
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申请号: US14325515申请日: 2014-07-08
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公开(公告)号: US09372392B2公开(公告)日: 2016-06-21
- 发明人: Martin Mazur , Dietmar Henke , Hans-Juergen Thees
- 申请人: GLOBALFOUNDRIES Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: G03F1/22
- IPC分类号: G03F1/22 ; G03F1/24 ; G03F7/20 ; G03F1/00
摘要:
In one example, a reticle disclosed herein includes a body having a center, an arrangement of a plurality of exposure patterns, wherein a center of the arrangement is offset from the center of the body, and at least one open feature defined on or through the body of the reticle. In another example, a method is disclosed that includes forming a layer of photoresist above a plurality of functional die and a plurality of incomplete die, exposing the photoresist material positioned above at least one of the functional die and/or at least one of the incomplete die, performing an incomplete die exposure processes via an open feature of the reticle to expose substantially all of the photoresist material positioned above the plurality of incomplete die, and developing the photoresist to remove the portions of the photoresist material positioned above the incomplete die.
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