Invention Grant
- Patent Title: T-shaped fin isolation region and methods of fabrication
- Patent Title (中): T形翅片隔离区和制造方法
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Application No.: US14515628Application Date: 2014-10-16
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Publication No.: US09373535B2Publication Date: 2016-06-21
- Inventor: Hongliang Shen , Zhenyu Hu , Jin Ping Liu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley and Mesiti PC
- Agent Nicholas Mesiti
- Main IPC: H01L21/62
- IPC: H01L21/62 ; H01L21/762 ; H01L27/088 ; H01L29/06 ; H01L21/8234 ; H01L21/311 ; H01L29/66

Abstract:
Semiconductor devices and fabrication methods are provided having an isolation feature within a fin structure which, for instance, facilitates isolating circuit elements supported by the fin structure. The fabrication method includes, for instance, providing an isolation material disposed, in part, within the fin structure, the isolation material being formed to include a T-shaped isolation region and a first portion extending into the fin structure, and a second portion disposed over the first portion and extending above the fin structure.
Public/Granted literature
- US20160111320A1 T-SHAPED FIN ISOLATION REGION AND METHODS OF FABRICATION Public/Granted day:2016-04-21
Information query
IPC分类: