发明授权
US09373678B2 Non-planar capacitors with finely tuned capacitance values and methods of forming the non-planar capacitors
有权
具有微调电容值的非平面电容器和形成非平面电容器的方法
- 专利标题: Non-planar capacitors with finely tuned capacitance values and methods of forming the non-planar capacitors
- 专利标题(中): 具有微调电容值的非平面电容器和形成非平面电容器的方法
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申请号: US14306294申请日: 2014-06-17
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公开(公告)号: US09373678B2公开(公告)日: 2016-06-21
- 发明人: Edward J. Nowak , Richard Q. Williams
- 申请人: International Business Machines Corporation
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人: GLOBALFOUNDRIES INC.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Gibb & Riley, LLC
- 代理商 Michael J. LeStrange, Esq.
- 主分类号: H01L21/20
- IPC分类号: H01L21/20 ; H01L27/06 ; H01L49/02 ; H01L29/78 ; H01L29/66 ; H01L21/308 ; H01L21/84 ; H01L27/12
摘要:
Disclosed are non-planar capacitors with finely tuned capacitances and methods of forming them. The capacitors each incorporate one or more semiconductor bodies and one or more gate stacks traversing the one or more semiconductor bodies. At least one first semiconductor body is etched so that it is shorter in length than the others, which are incorporated into other non-planar devices and/or into the same non-planar capacitor. Additionally, at least one gate stack can be formed so that it traverses a first portion and, particularly, an end portion of the shortened semiconductor body and further so that it extends laterally some distance beyond that first portion. In such capacitors, the length of the first portion of the shorted semiconductor body, which corresponds to a capacitor conductor and which is traversed by the gate stack, which corresponds to a capacitor dielectric and another capacitor conductor, is predetermined to achieve a desired capacitance.
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