发明授权
- 专利标题: Fabricating an apparatus for use in a sensing application
- 专利标题(中): 制造用于感测应用的设备
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申请号: US13194556申请日: 2011-07-29
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公开(公告)号: US09377409B2公开(公告)日: 2016-06-28
- 发明人: Min Hu , Zhiyong Li , Fung Suong Ou , Ansoon Kim
- 申请人: Min Hu , Zhiyong Li , Fung Suong Ou , Ansoon Kim
- 申请人地址: US TX Houston
- 专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人地址: US TX Houston
- 代理机构: Mannava & Kang, P.C.
- 主分类号: G01J3/44
- IPC分类号: G01J3/44 ; G01N21/65 ; G01J3/02 ; B82Y20/00
摘要:
In a method of fabricating an apparatus for use in a sensing application, a plurality of nano-fingers are formed on a substrate and a Raman-active material nano-particle is formed on respective tips of the nano-fingers. In addition, the Raman-active material nano-particles on the tips of adjacent ones of the nano-fingers are caused to come into contact with the Raman-active material nano-particle on the tip of at least another one of the plurality of nano-fingers to form respective clusters and the clusters of Raman-active material nano-particles are transferred to a component layer from the plurality of nano-fingers while maintaining a spatial relationship between the contacting Raman-active material nano-particles.