Invention Grant
US09377678B2 Method of processing a semiconductor wafer such as to make prototypes and related apparatus 有权
处理半导体晶片的方法,例如制造原型和相关装置

Method of processing a semiconductor wafer such as to make prototypes and related apparatus
Abstract:
A method of processing a semiconductor wafer may include providing a rotatably alignable photolithography mask that includes different mask images. Each mask image may be in a corresponding different mask sector. The method may also include performing a series of exposures with the rotatably alignable photolithography mask at different rotational alignments with respect to the semiconductor wafer so that the different mask images produce at least one working semiconductor wafer sector, and at least one non-working semiconductor wafer sector.
Information query
Patent Agency Ranking
0/0