Invention Grant
US09377678B2 Method of processing a semiconductor wafer such as to make prototypes and related apparatus
有权
处理半导体晶片的方法,例如制造原型和相关装置
- Patent Title: Method of processing a semiconductor wafer such as to make prototypes and related apparatus
- Patent Title (中): 处理半导体晶片的方法,例如制造原型和相关装置
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Application No.: US14084773Application Date: 2013-11-20
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Publication No.: US09377678B2Publication Date: 2016-06-28
- Inventor: Alan Lee , Xi Ge
- Applicant: STMICROELECTRONICS PTE LTD
- Applicant Address: SG Singapore
- Assignee: STMICROELECTRONICS PTE LTD
- Current Assignee: STMICROELECTRONICS PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F1/00 ; G03F1/42

Abstract:
A method of processing a semiconductor wafer may include providing a rotatably alignable photolithography mask that includes different mask images. Each mask image may be in a corresponding different mask sector. The method may also include performing a series of exposures with the rotatably alignable photolithography mask at different rotational alignments with respect to the semiconductor wafer so that the different mask images produce at least one working semiconductor wafer sector, and at least one non-working semiconductor wafer sector.
Public/Granted literature
- US20150140479A1 METHOD OF PROCESSING A SEMICONDUCTOR WAFER SUCH AS TO MAKE PROTOTYPES AND RELATED APPARATUS Public/Granted day:2015-05-21
Information query
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