Invention Grant
US09383196B2 System, method and computed readable medium for evaluating a parameter of a feature having nano-metric dimensions 有权
用于评估具有纳米尺度尺寸的特征的参数的系统,方法和计算的可读介质

System, method and computed readable medium for evaluating a parameter of a feature having nano-metric dimensions
Abstract:
A non-transitory computer readable medium, a system and a method. The method may include obtaining, by an image obtaining module, an image of a measurement site, the measurement site comprise the feature, the image of the measurement site comprises an image of the feature; processing, by an image processor, the image of the measurement site to provide an artificial image, the artificial image comprise a artificial image of an artificial feature, the artificial feature differs from the feature; measuring a parameter of the artificial feature to provide a measurement result, wherein the measuring comprises applying a measurement algorithm that is inadequate for measuring the parameter of the feature; and determining a value of the parameter of the feature in response to the measurement result.
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