Invention Grant
US09383196B2 System, method and computed readable medium for evaluating a parameter of a feature having nano-metric dimensions
有权
用于评估具有纳米尺度尺寸的特征的参数的系统,方法和计算的可读介质
- Patent Title: System, method and computed readable medium for evaluating a parameter of a feature having nano-metric dimensions
- Patent Title (中): 用于评估具有纳米尺度尺寸的特征的参数的系统,方法和计算的可读介质
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Application No.: US13787645Application Date: 2013-03-06
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Publication No.: US09383196B2Publication Date: 2016-07-05
- Inventor: Yuval Yahav , Ofer Adan
- Applicant: APPLIED MATERIALS ISRAEL, LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01B15/00 ; H01J37/22 ; G06T7/60 ; G03F7/20

Abstract:
A non-transitory computer readable medium, a system and a method. The method may include obtaining, by an image obtaining module, an image of a measurement site, the measurement site comprise the feature, the image of the measurement site comprises an image of the feature; processing, by an image processor, the image of the measurement site to provide an artificial image, the artificial image comprise a artificial image of an artificial feature, the artificial feature differs from the feature; measuring a parameter of the artificial feature to provide a measurement result, wherein the measuring comprises applying a measurement algorithm that is inadequate for measuring the parameter of the feature; and determining a value of the parameter of the feature in response to the measurement result.
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