Invention Grant
- Patent Title: Maskless exposure device
- Patent Title (中): 无掩模曝光装置
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Application No.: US14189663Application Date: 2014-02-25
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Publication No.: US09383651B2Publication Date: 2016-07-05
- Inventor: Hi Kuk Lee , Tsunemitsu Torigoe , Chang Hoon Kim , Ki Beom Lee , Su-Yeon Sim , Sang Hyun Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: KR10-2013-0056645 20130520
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
In an aspect, a grating light valve module including: a substrate; and a plurality of ribbons disposed on the substrate, wherein each of the ribbons includes an insulating layer, a conductive layer disposed on the insulating layer, and an anti-oxidation layer disposed on the conductive layer is provided.
Public/Granted literature
- US20140340662A1 MASKLESS EXPOSURE DEVICE Public/Granted day:2014-11-20
Information query
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