发明授权
- 专利标题： Resonator and fabricating method thereof
- 专利标题（中）： 谐振器及其制造方法
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申请号： US14073509申请日： 2013-11-06
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公开(公告)号： US09385303B2公开(公告)日： 2016-07-05
- 发明人: In Sang Song , Ho Soo Park , Duck Hwan Kim , Chul Soo Kim , Sang Uk Son , Jea Shik Shin , Moon Chul Lee
- 申请人： Samsung Electronics Co., Ltd.
- 申请人地址： KR Suwon-si
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KR Suwon-si
- 代理机构： NSIP Law
- 优先权： KR10-2013-0006898 20130122
- 主分类号： H03H9/15
- IPC分类号： H03H9/15 ; H03H9/00 ; H01L41/22 ; H01L41/314 ; H03H9/13 ; H03H9/17
摘要：
Provided are a resonator and a method of fabricating the same. The resonator may include a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode, a second electrode disposed on the piezoelectric layer, and a control layer disposed on the second electrode and having a frame with an uneven surface.
公开/授权文献
- US20140203686A1 RESONATOR AND FABRICATING METHOD THEREOF 公开/授权日：2014-07-24
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