Invention Grant
US09385314B2 Memory cell of resistive random access memory and manufacturing method thereof
有权
电阻随机存取存储器的存储单元及其制造方法
- Patent Title: Memory cell of resistive random access memory and manufacturing method thereof
- Patent Title (中): 电阻随机存取存储器的存储单元及其制造方法
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Application No.: US14510135Application Date: 2014-10-09
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Publication No.: US09385314B2Publication Date: 2016-07-05
- Inventor: Heng-Yuan Lee , Pei-Yi Gu , Yu-Sheng Chen
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW97130654A 20080812; TW101119371A 20120530
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A memory cell of a resistive random access memory and a manufacturing method thereof are provided. The method includes the following steps. A first electrode is formed. A metal oxide layer is formed on the first electrode. An electrode buffer stacked layer is formed on the metal oxide layer and includes a first buffer layer and a second buffer layer, and the first buffer layer is located between the second buffer layer and the metal oxide layer. The second buffer layer reacts with oxygen from the first buffer layer more strongly than the first buffer layer reacts with oxygen from the metal oxide layer. A second electrode layer is formed on the electrode buffer stacked layer.
Public/Granted literature
- US20150021542A1 MEMORY CELL OF RESISTIVE RANDOM ACCESS MEMORY AND MANUFACTURING METHOD THEREOF Public/Granted day:2015-01-22
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