Invention Grant
- Patent Title: MEMS microphone
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Application No.: US14684565Application Date: 2015-04-13
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Publication No.: US09386379B2Publication Date: 2016-07-05
- Inventor: Andrew Sparks , Todd M. Borkowski
- Applicant: Sand 9, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Chapin IP Law, LLC
- Main IPC: H04R17/02
- IPC: H04R17/02 ; B81B3/00 ; B81C1/00 ; G01L9/00

Abstract:
Mechanical resonating structures, as well as related devices and methods of manufacture. The mechanical resonating structures can be microphones, each including a diaphragm and a piezoelectric stack. The diaphragm can have one or more openings formed therethrough to enable the determination of an acoustic pressure being applied to the diaphragm through signals emitted by the piezoelectric stack.
Public/Granted literature
- US20150215706A1 MEMS MICROPHONE Public/Granted day:2015-07-30
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