Invention Grant
- Patent Title: Plating apparatus and plating method
- Patent Title (中): 电镀装置及电镀方法
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Application No.: US14223972Application Date: 2014-03-24
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Publication No.: US09388504B2Publication Date: 2016-07-12
- Inventor: Tomonori Hirao
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Baker & Hostetler LLP
- Priority: JP2013-063800 20130326; JP2013-069729 20130328
- Main IPC: B65G45/26
- IPC: B65G45/26 ; C25D17/06 ; C23C18/16 ; B65G45/24 ; B65G45/10 ; B65G45/22 ; C25D17/00

Abstract:
A plating apparatus includes a processing bath configured to store a processing liquid therein, a transporter configured to immerse a substrate holder, holding a substrate, in the processing liquid, raise the substrate holder out of the processing bath, and transport the substrate holder in a horizontal direction, and a gas flow generator configured to generate a clean gas flow forward of the substrate with respect to a direction in which the substrate holder is transported. The transporter moves the gas flow generator together with the substrate holder in the horizontal direction while transporting the substrate holder in the horizontal direction.
Public/Granted literature
- US20140295093A1 PLATING APPARATUS AND PLATING METHOD Public/Granted day:2014-10-02
Information query
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