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US09389197B2 Barrier film defect detecting method and apparatus 有权
阻隔膜缺陷检测方法及装置

Barrier film defect detecting method and apparatus
摘要:
A method for detecting a defect of a barrier film includes preparing a device including an electrode and a barrier film covering the electrode, allowing a charged medium to contact a surface of the barrier film, and measuring a change in a flow of current between the charged medium and the electrode.
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