Invention Grant
US09389334B2 Radiation generator having an actively evacuated acceleration column 有权
辐射发生器具有主动抽真空的加速柱

Radiation generator having an actively evacuated acceleration column
Abstract:
A radiation generator includes an ion source region, and an acceleration column downstream of the extractor electrode and in fluid communication with the ion source region. The ion source region and the acceleration column contain an ionizable gas. A vacuum pump pumps the ionizable gas from the acceleration column to the ion source region such that a gas pressure in the acceleration column is less than a gas pressure in the ion source region.
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