Invention Grant
- Patent Title: Power line filter for multidimensional integrated circuits
- Patent Title (中): 多维集成电路的电源线滤波器
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Application No.: US13437047Application Date: 2012-04-02
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Publication No.: US09391010B2Publication Date: 2016-07-12
- Inventor: Bo-Jr Huang , Yi-Wei Chen , Kuan-Yu Lin , Chin-Chou Liu
- Applicant: Bo-Jr Huang , Yi-Wei Chen , Kuan-Yu Lin , Chin-Chou Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: H03H7/01
- IPC: H03H7/01 ; H01L23/498 ; H01L23/14 ; H03H1/00 ; H01L25/065 ; H01L25/18 ; H01F17/00

Abstract:
An interposer element in a multidimensional integrated circuit with stacked elements has one or more conductors, especially power supply lines, coupled through decoupling networks defining low impedance shunts for high frequency signals to ground. The interposer has successive tiers including silicon, metal and dielectric deposition layers. The decoupling network for a conductor has at least one and preferably two reactive transmission lines. A transmission line has an inductor in series with the conductor and parallel capacitances at the inductor terminals. The inductors are formed by traces in spaced metal deposition layers forming coil windings and through vias connecting between layers to permit conductor crossovers. The capacitances are formed by MOScaps in the interposer layers. An embodiment has serially coupled coils with capacitances at the input, output and junction between the coils, wherein the coils are magnetically coupled to form a transformer.
Public/Granted literature
- US20130257564A1 POWER LINE FILTER FOR MULTIDIMENSIONAL INTEGRATED CIRCUITS Public/Granted day:2013-10-03
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