Invention Grant
US09391176B2 Multi-gate FETs having corrugated semiconductor stacks and method of forming the same 有权
具有波纹状半导体叠层的多栅极FET及其形成方法

Multi-gate FETs having corrugated semiconductor stacks and method of forming the same
Abstract:
The present disclosure provides, in various aspects of the present disclosure, a semiconductor device which includes a semiconductor stack disposed over a surface of a substrate and a gate structure partially formed over an upper surface and two opposing sidewall surfaces of the semiconductor stack, wherein the semiconductor stack includes an alternating arrangement of at least two layers formed by a first semiconductor material and a second semiconductor material which is different from the first semiconductor material.
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