发明授权
US09393642B2 Sealing apparatus, substrate-sealing apparatus including the same and substrate-sealing method
有权
密封装置，包括该密封装置的基板密封装置和基板密封方法
- 专利标题： Sealing apparatus, substrate-sealing apparatus including the same and substrate-sealing method
- 专利标题（中）： 密封装置，包括该密封装置的基板密封装置和基板密封方法
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申请号： US14218658申请日： 2014-03-18
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公开(公告)号： US09393642B2公开(公告)日： 2016-07-19
- 发明人: Jeong-Won Han
- 申请人： Samsung Display Co., Ltd.
- 申请人地址： KR
- 专利权人： Samsung Display Co., Ltd.
- 当前专利权人： Samsung Display Co., Ltd.
- 当前专利权人地址： KR
- 代理机构： Innovation Counsel LLP
- 优先权： KR10-2013-0096898 20130814
- 主分类号： H01L25/04
- IPC分类号： H01L25/04 ; B23K26/20 ; B23K26/00 ; H01L51/52 ; H01L51/56 ; B23K26/04 ; B23K26/073
摘要：
The sealing apparatus includes a measuring unit moving above a sealing unit to measure a pattern of the sealing unit, a laser beam irradiation device moving along the measuring unit to irradiate a laser beam onto the sealing unit, and a control unit controlling a moving path and a size of a focusing area of the laser beam irradiation device according to the pattern of the sealing unit that is measured in the measuring unit.