Invention Grant
- Patent Title: Meta-photoresist for lithography
- Patent Title (中): 用于光刻的元光致抗蚀剂
-
Application No.: US14296186Application Date: 2014-06-04
-
Publication No.: US09395624B2Publication Date: 2016-07-19
- Inventor: Ki-Hun Jeong , Youngseop Lee , Jae-Beom Kim
- Applicant: Korea Advanced Institute of Science and Technology
- Applicant Address: KR Daejeon
- Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee: Korea Advanced Institute of Science and Technology
- Current Assignee Address: KR Daejeon
- Agency: The Webb Law Firm
- Priority: KR10-2013-0078563 20130704
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C08K3/08 ; H01B1/22 ; H05K1/09 ; G03F7/095 ; G03F7/11

Abstract:
Provided are a meta-photoresist capable of transferring mask patterns on which fine patterns having a diffraction limit or less are formed, on a substrate, and a lithography method using the same, wherein the meta-photoresist contains a photosensitive resin layer and a metal particle layer which is a layer of metal particles arranged so as to be spaced apart from each other.
Public/Granted literature
- US20150010864A1 Meta-Photoresist for Lithography Public/Granted day:2015-01-08
Information query
IPC分类: