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US09395624B2 Meta-photoresist for lithography 有权
用于光刻的元光致抗蚀剂

Meta-photoresist for lithography
Abstract:
Provided are a meta-photoresist capable of transferring mask patterns on which fine patterns having a diffraction limit or less are formed, on a substrate, and a lithography method using the same, wherein the meta-photoresist contains a photosensitive resin layer and a metal particle layer which is a layer of metal particles arranged so as to be spaced apart from each other.
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