- Patent Title: Process for fabricating metal bus lines for OLED lighting panels
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Application No.: US13788321Application Date: 2013-03-07
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Publication No.: US09397312B2Publication Date: 2016-07-19
- Inventor: Peter Levermore , Huiqing Pang , Emory Krall , Rajan Kamala , Ruiqing Ma , Paul E. Burrows
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Morris & Kamlay LLP
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/52 ; H01L51/50 ; H01L51/56 ; H05B33/10 ; C23C14/04 ; C23C14/24 ; H01L27/32

Abstract:
Systems and methods for the design and fabrication of OLEDs, including high-performance large-area OLEDs, are provided. Variously described fabrication processes may be used to deposit and pattern bus lines with a smooth profile and a gradual sidewall transition. Such smooth profiles may, for example, reduce the probability of electrical shorting at the bus lines. Accordingly, in certain circumstances, an insulating layer may no longer be considered essential, and may be optionally avoided altogether. In cases where an insulating layer is not used, further enhancements in the emissive area and shelf life of the device may be achieved as well. According to aspects of the invention, bus lines such as those described herein may be deposited, and patterned, using vapor deposition such as vacuum thermal evaporation (VTE) through a shadow mask, and may avoid multiple photolithography steps. Other vapor deposition systems and methods may include, among others, sputter deposition, e-beam evaporation and chemical vapor deposition (CVD). A final profile of the bus line may substantially correspond to the profile as deposited.
Public/Granted literature
- US20140091282A1 PROCESS FOR FABRICATING METAL BUS LINES FOR OLED LIGHTING PANELS Public/Granted day:2014-04-03
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