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US09399239B2 Slit nozzle and liquid coating apparatus with the same 有权
狭缝喷嘴和液体涂装设备相同

Slit nozzle and liquid coating apparatus with the same
Abstract:
A slit nozzle of a liquid coating apparatus which discharges a liquid on a substrate, the slit nozzle includes a first nozzle part, a shim having an outlet configured to discharge the liquid and a second nozzle part facing the first nozzle part with the shim interposed therebetween. At least one of the first nozzle part and the second nozzle part has a sloping portion to prevent the discharged liquid from adhering to the slit nozzle.
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