A semiconductor test system includes test head pins; per-pin resources which are connectable to the test head pins on a one-to-one basis; shared resources, each of which is connectable to one of the test head pins; a tester controller for controlling the per-pin resources and the shared resources; and a tabular-form test plan including: a first column for specifying a measurement function that uses at least one of the per-pin resources and the shared resources; and at least one second column for specifying input and output parameters of the measurement function, the tabular-form test plan further including program rows, the tabular-form test plan being executed by the tester controller, the tabular-form test plan further including a third column for specifying how rows that are executed by asynchronous parallel execution are to be grouped.