Invention Grant
- Patent Title: Method of processing a semiconductor wafer
- Patent Title (中): 处理半导体晶片的方法
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Application No.: US14631206Application Date: 2015-02-25
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Publication No.: US09401343B2Publication Date: 2016-07-26
- Inventor: Achim Gratz , Scott David Wallace , Tobias Jacobs
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Murphy, Bilak & Homiller, PLLC
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L23/31 ; H01L23/58 ; H01L21/78 ; H01L21/66

Abstract:
A method of processing a semiconductor wafer includes forming semiconductor dies in the semiconductor wafer, each die having an active region containing devices of an integrated circuit and an edge region surrounding the active region, adjacent ones of the dies being separated by a scribe line. The method further includes forming interconnect wiring over the active region of each semiconductor die in an interlayer dielectric, forming ancillary wiring over the edge region of each die in the interlayer dielectric, forming a passivation on the interlayer dielectric, forming bond pads over the interconnect wiring of each die, the bond pads of each die being in electrical connection with the interconnect wiring of that die, and forming additional bond pads over the ancillary wiring of each semiconductor die, the additional bond pads of each die being in electrical connection with the interconnect wiring of that die.
Public/Granted literature
- US20150179606A1 METHOD OF PROCESSING A SEMICONDUCTOR WAFER Public/Granted day:2015-06-25
Information query
IPC分类: