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US09401343B2 Method of processing a semiconductor wafer 有权
处理半导体晶片的方法

Method of processing a semiconductor wafer
Abstract:
A method of processing a semiconductor wafer includes forming semiconductor dies in the semiconductor wafer, each die having an active region containing devices of an integrated circuit and an edge region surrounding the active region, adjacent ones of the dies being separated by a scribe line. The method further includes forming interconnect wiring over the active region of each semiconductor die in an interlayer dielectric, forming ancillary wiring over the edge region of each die in the interlayer dielectric, forming a passivation on the interlayer dielectric, forming bond pads over the interconnect wiring of each die, the bond pads of each die being in electrical connection with the interconnect wiring of that die, and forming additional bond pads over the ancillary wiring of each semiconductor die, the additional bond pads of each die being in electrical connection with the interconnect wiring of that die.
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