Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US14437755Application Date: 2012-11-27
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Publication No.: US09401425B2Publication Date: 2016-07-26
- Inventor: Huilong Zhu , Haizhou Yin , Zhijiong Luo
- Applicant: Institute of Microelectronics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Beijing
- Agency: Foley & Lardner LLP
- Agent Paul M. H. Pua
- Priority: CN201210417331 20121026
- International Application: PCT/CN2012/085353 WO 20121127
- International Announcement: WO2014/063404 WO 20140501
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L21/8234 ; H01L29/66 ; H01L29/06 ; H01L21/02 ; H01L21/306 ; H01L21/308 ; H01L21/762 ; H01L29/16 ; H01L29/161 ; H01L29/165

Abstract:
A semiconductor structure is disclosed. The semiconductor structure comprises: a substrate (130), a support structure (131), a base region (100), a gate stack, a spacer (240), and a source/drain region, wherein the gate stack is located on the base region (100), and the base region (100) is supported on the substrate (130) by the support structure (131), wherein the sidewall cross-section of the support structure (131) is in a shape of a concave curve; an isolation structure (123) is formed beneath the edges on both sides of the base region (100), wherein a portion of the isolation structure (123) is connected to the substrate (130); a cavity (112) is formed between the isolation structure (123) and the support structure (131); and there exists a source/drain region at least on both sides of the base region (100) and the isolation structure (123). Accordingly, a method for manufacturing the semiconductor structure is also disclosed.
Public/Granted literature
- US20150279993A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-10-01
Information query
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