Invention Grant
- Patent Title: Electroplating apparatus and process for wafer level packaging
- Patent Title (中): 电镀设备及晶圆级封装工艺
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Application No.: US13305384Application Date: 2011-11-28
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Publication No.: US09404194B2Publication Date: 2016-08-02
- Inventor: Steven T. Mayer , David W. Porter
- Applicant: Steven T. Mayer , David W. Porter
- Applicant Address: US CA Fremont
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D21/14 ; C25D21/18 ; C25D7/12 ; C25D3/60 ; C25D17/00 ; C25D3/56 ; C25D5/02 ; C25C1/20 ; C25C7/00

Abstract:
An apparatus for continuous simultaneous electroplating of two metals having substantially different standard electrodeposition potentials (e.g., for deposition of Sn—Ag alloys) comprises an anode chamber for containing an anolyte comprising ions of a first, less noble metal, (e.g., tin), but not of a second, more noble, metal (e.g., silver) and an active anode; a cathode chamber for containing catholyte including ions of a first metal (e.g., tin), ions of a second, more noble, metal (e.g., silver), and the substrate; a separation structure positioned between the anode chamber and the cathode chamber, where the separation structure substantially prevents transfer of more noble metal from catholyte to the anolyte; and fluidic features and an associated controller coupled to the apparatus and configured to perform continuous electroplating, while maintaining substantially constant concentrations of plating bath components for extended periods of use.
Public/Granted literature
- US20120138471A1 ELECTROPLATING APPARATUS AND PROCESS FOR WAFER LEVEL PACKAGING Public/Granted day:2012-06-07
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