Invention Grant
- Patent Title: Micropores and methods of making and using thereof
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Application No.: US14057170Application Date: 2013-10-18
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Publication No.: US09404913B2Publication Date: 2016-08-02
- Inventor: Thomas D. Perroud , Kamlesh D. Patel , Robert J. Meagher
- Applicant: Sandia Corporation
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agent Helen S. Baca
- Main IPC: B01L3/00
- IPC: B01L3/00 ; B81B1/00 ; C23F1/02 ; G01N33/50 ; B01F3/08 ; B01F5/04 ; B01F13/00 ; F15D1/00 ; B81B7/00 ; B81C1/00

Abstract:
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2× a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
Public/Granted literature
- US20140099241A1 Novel Micropores and Methods of Making and Using Thereof Public/Granted day:2014-04-10
Information query
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