Invention Grant
- Patent Title: Power rail for preventing DC electromigration
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Application No.: US14857212Application Date: 2015-09-17
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Publication No.: US09405883B2Publication Date: 2016-08-02
- Inventor: Chin-Shen Lin , Jerry Chang-Jui Kao , Nitesh Katta , Chou-Kun Lin , Yi-Chuin Tsai , Chi-Yeh Yu , Kuo-Nan Yang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McDermott Will & Emery LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L23/522 ; H01L23/528

Abstract:
A method is disclosed that includes the operations outlined below. A first criteria is determined to be met when directions of a first current and a second current around a first end and a second end of a metal segment respectively are opposite, in which the metal segment is a part of a power rail in at least one design file of a semiconductor device and is enclosed by only two terminal via arrays. A second criteria is determined to be met when a length of the metal segment is not larger than a electromigration critical length. The metal segment is included in the semiconductor device with a first current density limit depending on the length of the metal segment when the first and the second criteria are met.
Public/Granted literature
- US20160004809A1 POWER RAIL FOR PREVENTING DC ELECTROMIGRATION Public/Granted day:2016-01-07
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