Invention Grant
- Patent Title: Semiconductor power devices and methods of manufacturing the same
- Patent Title (中): 半导体功率器件及其制造方法
-
Application No.: US14504847Application Date: 2014-10-02
-
Publication No.: US09406543B2Publication Date: 2016-08-02
- Inventor: Jae-Hoon Lee , Tae-Geun Kim , Chan-Ho Park , Hyun-Jung Her
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2013-0152968 20131210; KR10-2014-0026567 20140306
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L21/761 ; H01L21/265 ; H01L29/40 ; H01L29/66 ; H01L29/06 ; H01L29/08

Abstract:
A semiconductor power device includes a substrate, a plurality of gate electrode structures, a floating well region and a termination ring region. The substrate has a first region and a second region. A plurality of gate electrode structures is formed on the substrate, each of the gate electrode structures extends from the first region to the second region and includes a first gate electrode, a second gate electrode and a connecting portion, the first and second gate electrodes extend in a first direction, and the connecting portion connects end portions of the first and second gate electrodes to each other. The floating well region is doped with impurities between the gate electrode structures in the first region of the substrate, and the floating well region has a first impurity concentration and a first depth. The termination ring region is doped with impurities in the second region of the substrate, is spaced apart from the gate electrode structures, and has a ring shape surrounding the first region, and has the first impurity concentration and the first depth. The semiconductor power device may have a high breakdown voltage.
Public/Granted literature
- US20150162423A1 SEMICONDUCTOR POWER DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2015-06-11
Information query
IPC分类: