Invention Grant
- Patent Title: Constrained nanosecond laser anneal of metal interconnect structures
- Patent Title (中): 金属互连结构的约束纳秒激光退火
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Application No.: US14490792Application Date: 2014-09-19
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Publication No.: US09412658B2Publication Date: 2016-08-09
- Inventor: Oleg Gluschenkov , Siddarth A. Krishnan , Joyeeta Nag , Andrew H. Simon , Shishir Ray
- Applicant: International Business Machines Corporation , GLOBALFOUNDRIES Inc.
- Applicant Address: US NY Armonk KY Grand Cayman
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC.
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC.
- Current Assignee Address: US NY Armonk KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers, Esq.
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L23/522 ; H01L21/768 ; H01L23/532 ; H01L21/4763

Abstract:
In-situ melting and crystallization of sealed cooper wires can be performed by means of laser annealing for a duration of nanoseconds. The intensity of the laser irradiation is selected such that molten copper wets interconnect interfaces, thereby forming an interfacial bonding arrangement that increases specular scattering of electrons. Nanosecond-scale temperature quenching preserves the formed interfacial bonding. At the same time, the fast crystallization process of sealed copper interconnects results in large copper grains, typically larger than 80 nm in lateral dimensions, on average. A typical duration of the annealing process is from about 10's to about 100's of nanoseconds. There is no degradation to interlayer low-k dielectric material despite the high anneal temperature due to ultra short duration that prevents collective motion of atoms within the dielectric material.
Public/Granted literature
- US20160086849A1 CONSTRAINED NANOSECOND LASER ANNEAL OF METAL INTERCONNECT STRUCTURES Public/Granted day:2016-03-24
Information query
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