发明授权
US09418993B2 Device and method for a LDMOS design for a FinFET integrated circuit
有权
用于FinFET集成电路的LDMOS设计器件和方法
- 专利标题: Device and method for a LDMOS design for a FinFET integrated circuit
- 专利标题(中): 用于FinFET集成电路的LDMOS设计器件和方法
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申请号: US13958938申请日: 2013-08-05
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公开(公告)号: US09418993B2公开(公告)日: 2016-08-16
- 发明人: Jagar Singh
- 申请人: GLOBALFOUNDRIES Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Heslin Rothenberg Farley & Mesiti P.C.
- 代理商 Jacquelyn Graff
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/8234 ; H01L29/40 ; H01L29/78 ; H01L29/06
摘要:
Semiconductor devices and methods for manufacturing an LDMOS FinFET integrated circuit. The intermediate semiconductor device includes a substrate, a first well in the substrate, a second well in the substrate, and at least two polysilicon gates. The first well overlaps the second well and the at least one first gate is disposed over the first well and at least one second gate is disposed over the second well. The method includes forming a channel region and a drift region in the substrate, wherein the channel region overlaps the drift region, forming a shallow trench isolation region in the drift region, forming at least one first gate over the channel region, forming at least one second gate over the shallow trench isolation region, and applying at least one metal layer over the at least one first gate and the at least one second gate.
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